Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics

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Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics

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ژورنال

عنوان ژورنال: IEICE Transactions on Electronics

سال: 2007

ISSN: 0916-8524,1745-1353

DOI: 10.1093/ietele/e90-c.1.78